Effects of Nb Doping on Crystalline Orientation, Microstructure and Electrical Properties of Non-Stoichiometric PZT Thick Films via Hybrid Sol-Gel Method

Yi Chia Lee, Cheng Che Tsai, Yu Cheng Liou, Cheng Shong Hong, Sheng Yuan Chu

研究成果: Article同行評審

摘要

In this research, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)1-xNbxO3 PZT-based piezoelectric thick films. By preparing sol-gel solutions with different Nb concentrations (x = 0%-4%) and mixing them with PZT-5A piezoelectric powders, the microstructure and electrical properties were improved. The X-ray diffraction (XRD) and scanning electron microscope (SEM) results showed that PZT films with 2% Nb doping exhibited high crystallinity and dense surfaces. The maximum dielectric constant, piezoelectric coefficient d33 of 133(pm V-1), and remnant polarization value of 58(μC cm-2) were obtained in a 2% Nb-dopant. These data were much better than the published results. Roughness and dielectric loss were also improved significantly with 2% Nb dopants.

原文English
文章編號063010
期刊ECS Journal of Solid State Science and Technology
10
發行號6
DOIs
出版狀態Published - 2021

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料

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