Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel

Bao Shun Yau, Jow Lay Huang

研究成果: Article同行評審

12 引文 斯高帕斯(Scopus)

摘要

Silicon nitride films were deposited on high speed steel by r.f. reactive magnetron sputtering. The effects of nitrogen flow rate on the deposition rate, chemical composition, microstructure and mechanical properties were evaluated. The deposition rate, nitrogen content, hardness and reduced elastic modulus decreased with increasing nitrogen flow rate. The decrease of coating hardness could decrease constraint stress, and hence decrease the shear stress at the interface, which resulted in higher critical load.

原文English
頁(從 - 到)290-295
頁數6
期刊Surface and Coatings Technology
176
發行號3
DOIs
出版狀態Published - 2004 一月 15

All Science Journal Classification (ASJC) codes

  • 化學 (全部)
  • 凝聚態物理學
  • 表面和介面
  • 表面、塗料和薄膜
  • 材料化學

指紋

深入研究「Effects of nitrogen flow on R.F. reactive magnetron sputtered silicon nitride films on high speed steel」主題。共同形成了獨特的指紋。

引用此