Effects of Pva adding on the microstructure and composition of sol-gel derived PZT films

Tien I. Chang, Sheng Chang Wang, Chen Fu Lin, Jow Lay Huang

研究成果: Conference article同行評審

2 引文 斯高帕斯(Scopus)

摘要

Lead zirconate titanate (PZT, 53/47) films were successfully fabricated on multi-layers substrate (Pt/Ti/SiO2/Si) by the spin-coating via sol-gel process. A special core-shell structure was formed in the films by the adding of PVA polymer. XRD results showed that PZT films transform to pure perovskite phase entirely after annealing at 700C for 90 min. By EPMA analysis, the composition of PZT thin film derived by this procedure was located at the morphotrophic phase boundary (MPB) region. Furthermore, the composition variations in the core-shell structure were identified by the backscattering electron image (BEI) analysis. With this innovative procedure, crack-free PZT films were successfully obtained.

原文English
頁(從 - 到)129-138
頁數10
期刊Integrated Ferroelectrics
85
發行號1
DOIs
出版狀態Published - 2006
事件18th International Symposium on Integrated Ferroelectrics (ISIF 2006) - Honolulu, Hawaii, United States
持續時間: 2006 四月 232006 四月 27

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 控制與系統工程
  • 陶瓷和複合材料
  • 凝聚態物理學
  • 電氣與電子工程
  • 材料化學

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