Lead zirconate titanate (PZT, 53/47) films were successfully fabricated on multi-layers substrate (Pt/Ti/SiO2/Si) by the spin-coating via sol-gel process. A special core-shell structure was formed in the films by the adding of PVA polymer. XRD results showed that PZT films transform to pure perovskite phase entirely after annealing at 700C for 90 min. By EPMA analysis, the composition of PZT thin film derived by this procedure was located at the morphotrophic phase boundary (MPB) region. Furthermore, the composition variations in the core-shell structure were identified by the backscattering electron image (BEI) analysis. With this innovative procedure, crack-free PZT films were successfully obtained.
|頁（從 - 到）||129-138|
|出版狀態||Published - 2006|
|事件||18th International Symposium on Integrated Ferroelectrics (ISIF 2006) - Honolulu, Hawaii, United States|
持續時間: 2006 四月 23 → 2006 四月 27
All Science Journal Classification (ASJC) codes