TY - JOUR
T1 - Effects of roughness on rarefied gas flow in long microtubes
AU - Li, Wang Long
AU - Lin, Jau Wen
AU - Lee, Shun Ching
AU - Chen, Ming Da
PY - 2002/2
Y1 - 2002/2
N2 - In this paper, we propose a model that describes the behavior of rarefied gas flow in long microtubes. The inner surface is modeled as an annulus porous film pressed on an impermeable surface. The appropriate slip-flow boundary conditions (the high-order slip-flow model; Weng C-I et al 1999 Nanotechnology 10 373) and the proper porous flow model (the Brinkman-extended Darcy model; Li W-L and H Wang C-C 1999 J. Phys. D: Appl. Phys. 32 1421) are utilized in the core gas region and annulus porous region, respectively. Moreover, utilizing the matched conditions (velocity slip and stress continuity) at the gas/porous interface, we derive the governing equation of pressure distribution in long microtubes. We discuss the effects of pressure drop (Pin - Pout), roughness and gas rarefaction on the pressure distribution and velocity distributions of long microtubes. Moreover, the analytical solution of the pressure distribution for the first-order slip-flow model is obtained. The present results are valuable for the design and analysis of fluid flow in microelectromechanical systems.
AB - In this paper, we propose a model that describes the behavior of rarefied gas flow in long microtubes. The inner surface is modeled as an annulus porous film pressed on an impermeable surface. The appropriate slip-flow boundary conditions (the high-order slip-flow model; Weng C-I et al 1999 Nanotechnology 10 373) and the proper porous flow model (the Brinkman-extended Darcy model; Li W-L and H Wang C-C 1999 J. Phys. D: Appl. Phys. 32 1421) are utilized in the core gas region and annulus porous region, respectively. Moreover, utilizing the matched conditions (velocity slip and stress continuity) at the gas/porous interface, we derive the governing equation of pressure distribution in long microtubes. We discuss the effects of pressure drop (Pin - Pout), roughness and gas rarefaction on the pressure distribution and velocity distributions of long microtubes. Moreover, the analytical solution of the pressure distribution for the first-order slip-flow model is obtained. The present results are valuable for the design and analysis of fluid flow in microelectromechanical systems.
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U2 - 10.1088/0960-1317/12/2/308
DO - 10.1088/0960-1317/12/2/308
M3 - Article
AN - SCOPUS:0036466391
SN - 0960-1317
VL - 12
SP - 149
EP - 156
JO - Journal of Micromechanics and Microengineering
JF - Journal of Micromechanics and Microengineering
IS - 2
ER -