TY - GEN
T1 - Effects of sputtering power on optical and electrical properties of al-doped ZnO thin film on flexible substrates
AU - Hsieh, Po Tsung
AU - Li, Tse Chang
AU - Chung, Chung Jen
AU - Peng, Hsin Shu
AU - Lin, Jen Fin
N1 - Copyright:
Copyright 2012 Elsevier B.V., All rights reserved.
PY - 2012
Y1 - 2012
N2 - AZO thin films were deposited using a magnetron sputtering system with an AZO target (with 3wt% Al2O3) on polyethylene terephthalate (PET) substrates with pre-strain. The effect of sputtering power on the optical and electrical properties of AZO films was investigated. For samples deposited on pre-strained PET substrates, X-ray diffraction was used to determine the c-axis orientation of AZO films deposited at 60, 80, and 100 W. Results show that resistivity decreased with increasing sputtering power, which might result from the better crystalline structure and fewer grain boundaries obtained at high power. The transmittance increased when the power was increased from 60 to 100 W. The absorption edge thus decreased for AZO film deposited at 100 W.
AB - AZO thin films were deposited using a magnetron sputtering system with an AZO target (with 3wt% Al2O3) on polyethylene terephthalate (PET) substrates with pre-strain. The effect of sputtering power on the optical and electrical properties of AZO films was investigated. For samples deposited on pre-strained PET substrates, X-ray diffraction was used to determine the c-axis orientation of AZO films deposited at 60, 80, and 100 W. Results show that resistivity decreased with increasing sputtering power, which might result from the better crystalline structure and fewer grain boundaries obtained at high power. The transmittance increased when the power was increased from 60 to 100 W. The absorption edge thus decreased for AZO film deposited at 100 W.
UR - http://www.scopus.com/inward/record.url?scp=84869461172&partnerID=8YFLogxK
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U2 - 10.4028/www.scientific.net/AMR.579.118
DO - 10.4028/www.scientific.net/AMR.579.118
M3 - Conference contribution
AN - SCOPUS:84869461172
SN - 9783037855119
T3 - Advanced Materials Research
SP - 118
EP - 123
BT - Advanced Manufacturing Focusing on Multi-Disciplinary Technologies
T2 - 4th International Conference on Advanced Manufacturing, ICAM 2012
Y2 - 4 March 2012 through 8 March 2012
ER -