TY - GEN
T1 - Effects of substrate residue on the frequency response of high-tone bulk acoustic resonator
AU - Lin, Re Ching
AU - Chen, Ying Chung
AU - Hsieh, Po Tsung
AU - Kao, Kuo Sheng
AU - Wang, Chih Ming
PY - 2007
Y1 - 2007
N2 - The high-tone bulk acoustic resonator (HBAR), consisted of a Mo/ZnO/Pt/Ti/Si structure, is fabricated. The thickness of Si substrate under HBAR is controlled by a twostep process of wet- and dry-etching. The resonance frequency spacing (Δf) of HBAR is dependent on the etching duration. The frequency response of the HBAR is measured using an HP8720 network analyzer and a CASCADE probe station. The estimation of Si residue based on the high-tone resonant phenomenon coincides with practical measurements. A frequency response with no harmonic resonance, which is an extreme case of HBAR without Si residue, is revealed. Furthermore, a sensor of high-frequency bulk acoustic wave resonator is obtained.
AB - The high-tone bulk acoustic resonator (HBAR), consisted of a Mo/ZnO/Pt/Ti/Si structure, is fabricated. The thickness of Si substrate under HBAR is controlled by a twostep process of wet- and dry-etching. The resonance frequency spacing (Δf) of HBAR is dependent on the etching duration. The frequency response of the HBAR is measured using an HP8720 network analyzer and a CASCADE probe station. The estimation of Si residue based on the high-tone resonant phenomenon coincides with practical measurements. A frequency response with no harmonic resonance, which is an extreme case of HBAR without Si residue, is revealed. Furthermore, a sensor of high-frequency bulk acoustic wave resonator is obtained.
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U2 - 10.1109/FREQ.2007.4319164
DO - 10.1109/FREQ.2007.4319164
M3 - Conference contribution
AN - SCOPUS:49649083642
SN - 1424406463
SN - 9781424406463
T3 - Proceedings of the IEEE International Frequency Control Symposium and Exposition
SP - 695
EP - 698
BT - 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
T2 - 2007 IEEE International Frequency Control Symposium Joint with the 21st European Frequency and Time Forum, FCS
Y2 - 29 May 2007 through 1 June 2007
ER -