Effects of surface roughness and gas rarefaction on the quality factor of micro-beam resonators

Chi Cuong Nguyen, Wang Long Li

研究成果: Article同行評審

3 引文 斯高帕斯(Scopus)

摘要

In this paper, the average modified molecular gas lubrication (MMGL) equation is utilized to analyze the squeeze film damping (SFD) of micro-beam resonators. Under thin gas film spacing and low ambient pressure conditions, the effects of surface roughness and gas rarefaction become important due to their larger surface area to volume ratio. The external SFD and the combined structural damping [thermoelastic damping (TED) and anchor loss] are studied on the quality factor (Q-factor) of micro-beam resonators. The coupling effects of surface roughness and gas rarefaction on SFD are discussed. The results show that the effects of surface roughness are diluted by the gas rarefaction. The Q-factor of micro-beam resonators depends significantly on surface roughness (film thickness ratio, Peklenik number) in higher gas rarefaction (low ambient pressure, low accommodation coefficients) and/or higher modes of the resonators.

原文English
頁(從 - 到)3489-3504
頁數16
期刊Microsystem Technologies
23
發行號8
DOIs
出版狀態Published - 2017 八月 1

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials
  • Condensed Matter Physics
  • Hardware and Architecture
  • Electrical and Electronic Engineering

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