Effects of surface treatment and annealing on properties of InN layers grown using metal organic chemical vapor deposition

Sheng-Po Chang, Kuan-Jen Chen, Po Jui Kuo, Yu Zung Chiou

研究成果: Conference contribution

摘要

We report the effects surface treatment and annealing had on the properties of InN layers grown using metal organic chemical vapor deposition (MOCVD). The number of defects due to N vacancies decreased significantly with increasing annealing temperature. However, when the annealing temperature reached 700°C, the crystalline grain became larger on the film surfaces. Annealing at an appropriate temperature improved the crystalline quality and the electrical properties of the InN films. However, when the annealing temperature was too high, InN oxidized and even dissociated.

原文English
主出版物標題Frontiers of Manufacturing and Design Science III
頁面190-196
頁數7
版本PART 1
DOIs
出版狀態Published - 2013 一月 24
事件3rd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2012 - , Hong Kong
持續時間: 2012 十二月 112012 十二月 13

出版系列

名字Applied Mechanics and Materials
號碼PART 1
271
ISSN(列印)1660-9336
ISSN(電子)1662-7482

Other

Other3rd International Conference on Frontiers of Manufacturing and Design Science, ICFMD 2012
國家Hong Kong
期間12-12-1112-12-13

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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