Effects of temperature on niobium-doped MgZnO films grown using radio-frequency magnetron sputtering

Kuang Po Hsueh, Chao Yung Huang, Hsien Chin Chiu, Jinn Kong Sheu, Yu Hsiang Yeh

研究成果: Article同行評審

摘要

Niobium-doped MgxZn1-xO (Nb-MZO) mixed oxide films with high transmittance were successfully deposited on sapphire substrates through radio-frequency (RF)magnetron sputtering using a 4-in ZnO/MgO/NbOx (75/20/5 wt%) target. In this study, the films were analyzed using Hall measurements, X-ray diffraction (XRD), transparent performance measurements, and X-ray photoelectron spectroscopy (XPS). XRD results showed two peaks: MgO2 (002)-wurtzite and MgxZn1-xO (111)-cubic peaks. The Nb-MZO films exhibited high transparency, with transmittance exceeding 90% in the visible region and a sharp absorption edge in the ultraviolet (UV) region, implying that the MgO content in the Nb-MZO layer increased the bandgaps. These results indicate that Nb-MZO films are ideal for use as transparent contact layers in near-UV light-emitting diodes. Hall measurements and XPS results successfully demonstrated the p-type conductivity of the Nb-MZO films because of the composition of the N-Nb binding caused by annealing in nitrogen atmosphere.

原文English
頁(從 - 到)Q96-Q100
期刊ECS Journal of Solid State Science and Technology
4
發行號8
DOIs
出版狀態Published - 2015

All Science Journal Classification (ASJC) codes

  • Electronic, Optical and Magnetic Materials

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