Effects of ZnO buffer layer on characteristics of ZnO:Ga films grown on flexible substrates: Investigation of surface energy, electrical, optical, and structural properties

Jia Ling Wu, Han Yu Lin, Yu Cheng Chen, Sheng Yuan Chu, Chia Chiang Chang, Chin Jyi Wu, Yung Der Juang

研究成果: Article同行評審

15 引文 斯高帕斯(Scopus)

摘要

Ga-doped ZnO (GZO) transparent conductive oxide thin films were deposited on flexible polyethersulphone (PES) substrates by radio-frequency sputtering at room temperature. With the addition of an optimized 100-nm-thick ZnO buffer layer, the transmittance, carrier concentration, Hall mobility, and resistivity of GZO films improved from 88.3 to 94.45%, -2.89 × 1021 to -3.39 × 1021 cm-3, 1.76 to 7.97 cm2/V-s, and 1.32 × 10-3 to 2.201 × 10-4 Ω-cm, respectively. The higher surface energy (49.85 mJ/m2) of the 100-nm-thick ZnO layer deposited on the PES substrate compared to those of a bare PES substrate and ZnO layers of other thicknesses deposited on PES substrates is likely responsible for the superior GZO quality obtained with the GZO/100-nm-thick ZnO buffer/PES structure. Moreover, the best adhesion at the GZO surface was observed for the GZO/100-nm-thick ZnO buffer/PES structure based on it having the highest surface energy (67.33 mJ/m2). The GZO/100-nm-thick ZnO buffer/PES structure thus has potential to replace the GZO/PES structure for use in flexible transparent optoelectronic devices.

原文English
頁(從 - 到)P115-P119
期刊ECS Journal of Solid State Science and Technology
2
發行號4
DOIs
出版狀態Published - 2013

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料

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