Electrical contacts of metals to carbon-nanotubes for applications to electrical coupling between miniaturized moving parts and sensors

Y. Tzeng, Y. Chen, C. Liu, V. Krishnardula

研究成果: Conference contribution

3 引文 斯高帕斯(Scopus)

摘要

Aligned carbon nanotubes were grown on electrodes by means of thermal chemical vapor deposition in mixtures of argon and acetylene using iron catalyst. These flexible, strong, and electrically conductive carbon nanotubes were used to couple electrical current between movable electrodes. Electrical contact resistance as a function of current loading, contact orientation, and distance between counter electrodes was measured. Methods of fabricating the carbon nanotube coated electrodes and potential applications to electrical coupling for moving parts in Micro-Electro-Mechanical Systems (MEMS), position sensitive sensors, and pressure sensors are discussed.

原文English
主出版物標題2004 4th IEEE Conference on Nanotechnology
頁面495-497
頁數3
出版狀態Published - 2004
事件2004 4th IEEE Conference on Nanotechnology - Munich, Germany
持續時間: 2004 8月 162004 8月 19

出版系列

名字2004 4th IEEE Conference on Nanotechnology

Other

Other2004 4th IEEE Conference on Nanotechnology
國家/地區Germany
城市Munich
期間04-08-1604-08-19

All Science Journal Classification (ASJC) codes

  • 一般工程

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