Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators

Bing Liang Chen, Pao Cheng Huang, Ling Sheng Jang, Ming Kun Chen

研究成果: Article同行評審

4 引文 斯高帕斯(Scopus)


A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.

頁(從 - 到)1080-1085
期刊Microelectronics Reliability
出版狀態Published - 2012 6月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 原子與分子物理與光學
  • 凝聚態物理學
  • 安全、風險、可靠性和品質
  • 表面、塗料和薄膜
  • 電氣與電子工程


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