Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators

Bing Liang Chen; Pao Cheng Huang; Ling Sheng Jang; Ming Kun Chen

doi:10.1016/j.microrel.2012.01.004

Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators

Bing Liang Chen, Pao Cheng Huang, Ling Sheng Jang, Ming Kun Chen

電機工程學系

研究成果: Article › 同行評審

4 引文斯高帕斯（Scopus）

摘要

A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.

原文	English
頁（從 - 到）	1080-1085
頁數	6
期刊	Microelectronics Reliability
卷	52
發行號	6
DOIs	https://doi.org/10.1016/j.microrel.2012.01.004
出版狀態	Published - 2012 6月

All Science Journal Classification (ASJC) codes

電子、光磁材料
原子與分子物理與光學
凝聚態物理學
安全、風險、可靠性和品質
表面、塗料和薄膜
電氣與電子工程

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10.1016/j.microrel.2012.01.004

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@article{384fb66709b6425fbf99fbec7afb5b43,

title = "Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators",

abstract = "A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.",

author = "Chen, {Bing Liang} and Huang, {Pao Cheng} and Jang, {Ling Sheng} and Chen, {Ming Kun}",

note = "Funding Information: The authors would like to thank the Center for Micro/Nano Science and Technology and the National Nano Device Laboratories in Tainan, Taiwan, for their technical support and access to equipment. This study made use of shared facilities supported by the Program of Top 100 Universities Advancement sponsored by the Ministry of Education, Taiwan.",

year = "2012",

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doi = "10.1016/j.microrel.2012.01.004",

language = "English",

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T1 - Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators

AU - Chen, Bing Liang

AU - Huang, Pao Cheng

AU - Jang, Ling Sheng

AU - Chen, Ming Kun

N1 - Funding Information: The authors would like to thank the Center for Micro/Nano Science and Technology and the National Nano Device Laboratories in Tainan, Taiwan, for their technical support and access to equipment. This study made use of shared facilities supported by the Program of Top 100 Universities Advancement sponsored by the Ministry of Education, Taiwan.

PY - 2012/6

Y1 - 2012/6

N2 - A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.

AB - A detection method based on electrical analysis for valveless peristaltic lead zirconate titanate (PZT) micropump fabrication is proposed. The modified Butterworth-Van Dyke (BVD) model is used to analyze the properties of resistant or capacitive elements related to various failures. The series resistance and parallel capacitance in the BVD model are used to detect faults and classify the failure type. The failure analysis of the micropump assembly process focuses on the three common failures: (a) PZT cracking, (b) uneven silver epoxy distribution, and (c) PZT inversion. The analysis approach combines experimental results with a circuit model to determine PZT micropump fabrication reliability. It can be used to detect defects in peristaltic PZT micropumps and classify failure type.

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DO - 10.1016/j.microrel.2012.01.004

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JO - Microelectronics Reliability

JF - Microelectronics Reliability

SN - 0026-2714

IS - 6

ER -

Electrical failure analysis of peristaltic micropumps fabricated with PZT actuators

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