Electrical reliability issues of integrating thin Ta and TaN barriers with Cu and low-K dielectric

Zhen Cheng Wu, Chau Chiung Wang, Ren Guay Wu, Yu Lin Liu, Peng Sen Chen, Zhe Min Zhu, Mao Chieh Chen, Jiann Fu Chen, Chung I. Chang, Lai Juh Chen

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11 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds