Electrokinetically driven active micro-mixers utilizing zeta potential variation induced by field effect

Chia Yen Lee, Gwo Bin Lee, Lung Ming Fu, Kuo Hoong Lee, Ruey Jen Yang

研究成果: Article同行評審

92 引文 斯高帕斯(Scopus)

摘要

An electrokinetically driven active micro-mixer, which uses localized capacitance effects to induce zeta potential variations along the surface of silica-based microchannels, is presented. It is shown that the mixer is fabricated through etching bulk flow and shielding electrode channels into glass substrates and depositing Au/Cr thin films within the latter to form capacitor electrodes. It was shown that buried shielding electrodes can induce the field effect, resulting in higher variations of zeta potential. It was also demonstrated that the developed microfluidic device permits a high a degree of control over the fluid flow and an efficient mixing effect.

原文English
頁(從 - 到)1390-1398
頁數9
期刊Journal of Micromechanics and Microengineering
14
發行號10
DOIs
出版狀態Published - 2004 十月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 材料力學
  • 機械工業
  • 電氣與電子工程

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