A novel technique for the fabrication of electromagnetic micro actuators and micro pumps is proposed. The actuator is composed of a diaphragm, micro-coils, and a magnet. When an electrical current is applied to the micro-coils, the magnetic force produced between the magnet and the coil causes the diaphragm to deflect, which is the source of actuation. Photo-lithography, electron beam evaporation, and electroplating are used in the fabrication process. The actuating device uses polydimethylsiloxane (PDMS) for the vibrating diaphragm, polyimide (PI) for the insulating layer, and electroplated copper for the coil. The diaphragm deflection can be regulated by varying the current passed through the micro-coil. Three types of micro-coil are presented, namely those with a 150-μm line width and a 150-μm spacing, a 125-μm line width and a 150-μm spacing, and a 100- μm line width and a 125-μm spacing. The proposed micro actuator has a maximum displacement of 81.33 μm. The experimental results indicate a maximum flow rate of 0.52 nL/min with a driving frequency of 200 Hz and an applied voltage of 1.5 V.
All Science Journal Classification (ASJC) codes
- 環境科學 (全部)
- 工程 (全部)