摘要
Electromagnetic optical switch for optical network communication was presented. The switch consisted of planar coil with high aspect ratio, design of micromagnetic circuit, and Ni/Fe permalloy by microelectroplating. The device actuated by passing a current of sufficient magnitude generated a magnetic field which switched on the microactuator. The process eliminated the problems of etching selectivity and residual stress problems and provided two times larger force output than conventional magnetic microactuators.
原文 | English |
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頁(從 - 到) | 610-613 |
頁數 | 4 |
期刊 | Journal of Magnetism and Magnetic Materials |
卷 | 239 |
發行號 | 1-3 |
DOIs | |
出版狀態 | Published - 2002 2月 1 |
All Science Journal Classification (ASJC) codes
- 電子、光磁材料
- 凝聚態物理學