Electromagnetic optical switch for optical network communication was presented. The switch consisted of planar coil with high aspect ratio, design of micromagnetic circuit, and Ni/Fe permalloy by microelectroplating. The device actuated by passing a current of sufficient magnitude generated a magnetic field which switched on the microactuator. The process eliminated the problems of etching selectivity and residual stress problems and provided two times larger force output than conventional magnetic microactuators.
|頁（從 - 到）||610-613|
|期刊||Journal of Magnetism and Magnetic Materials|
|出版狀態||Published - 2002 2月 1|
All Science Journal Classification (ASJC) codes