Electromagnetic optical switch for optical network communication

Cheng Tang Pan, Sheng Chih Shen, His Harng Yang, Min Chieh Chou, Shinn Tyan Wu

研究成果: Conference article同行評審

摘要

The electromagnetic optical switch combines with Ni/Fe permalloy magnetic circuit design, high aspect ratio microstructure electroplating, bulk micromachining, excimer laser ablation and low temperature wafer bonding. The result shows it can output force 68mN, deflection angle can reach 82° only with 4820A/m, frequency can reach 2kHz, and bonding strength can be larger than 216 kg/cm2.

原文English
頁(從 - 到)240-246
頁數7
期刊Proceedings of SPIE - The International Society for Optical Engineering
4582
DOIs
出版狀態Published - 2001 十二月 1
事件Optical Switching and Optical Interconnection - Beijing, China
持續時間: 2001 十一月 122001 十一月 15

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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