Electromechanical analysis of a piezoelectric beam used to drive a torsional microactuator

Jin H. Huang, Jhao Ming Chen, Y. C. Shiah

研究成果: Article同行評審

2 引文 斯高帕斯(Scopus)

摘要

The present paper is to analyze the electromechanical responses of a piezoelectric beam in a novel torsional microactuator designed for digital micromirror devices. With the capability of self-detecting rotating angles, the microactuator is designed to actuate high rotating angles when applied with a low voltage. Having laid the design foundation of such devices for the industry, the present work analyzes the electromechanical response of the piezoelectric beam used to drive the micromirror. An analytical expression for the axial deformation of a PZT-4 cantilever beam in response to an applied voltage is presented in this article. Also, numerical investigations are conducted to study the effect of the beam's length and thickness on its axial deformation.

原文English
頁(從 - 到)543-553
頁數11
期刊Journal of Intelligent Material Systems and Structures
18
發行號6
DOIs
出版狀態Published - 2007 六月

All Science Journal Classification (ASJC) codes

  • 材料科學(全部)
  • 機械工業

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