Electron heating in inductively coupled discharges

研究成果: Article同行評審

23 引文 斯高帕斯(Scopus)

摘要

An analytic expression for the surface impedance for electron heating in inductively coupled discharges is derived from the kinetic equation with the optimum ordering that ν∼ω. Here, ν is the electron collision frequency, and ω is the frequency of the driven current inside the antenna coil. The expression is valid for both collisional and collisionless discharges, and can be employed in the modeling of the source.

原文English
頁(從 - 到)3300-3303
頁數4
期刊Physics of Plasmas
3
發行號9
DOIs
出版狀態Published - 1996

All Science Journal Classification (ASJC) codes

  • 凝聚態物理學

指紋

深入研究「Electron heating in inductively coupled discharges」主題。共同形成了獨特的指紋。

引用此