Eletrical and mechanical properies of nitrogen and fluorine incorporated organosilicate glass prepared by plasma enhanced chemical vapor deposition

Shiu Ko JangJian, Chuan Pu Liu, Weng Sing Hwang, Sheng Wen Chen, Kuo Hsiu Wei, Ying Lang Wang

研究成果: Paper同行評審

1 引文 斯高帕斯(Scopus)

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Engineering & Materials Science

Chemical Compounds