@article{1d0c0285583844fbb50c6d19441d9fde,
title = "Enhanced antiferromagnetic saturation in amorphous CoFeB-Ru-CoFeB synthetic antiferromagnets by ion-beam assisted deposition",
abstract = "The interlayer coupling of CoFeB-based synthetic antiferromagnets (SyAFs), modulated by the ion-beam assisted deposition (IBAD) has been systematically investigated under different assisted deposition voltage from 0 to 140 V. We observe that proper IBAD voltage can significantly enhance the antiferromagnetically coupled saturation field from 280 to 1000 Oe and retain the amorphous structure of CoFeB layers. This approach provides a convenient method to enhance the magnetic coupling of SyAFs, which is useful for the magnetic tunnel junctions fabrication and magnetoresistive random access memory development.",
author = "Huang, {J. C.A.} and Hsu, {C. Y.} and Chen, {S. F.} and Liu, {C. P.} and Liao, {Y. F.} and Lin, {M. Z.} and Lee, {C. H.}",
note = "Funding Information: This work has been supported by the National Science Council of the ROC under Grant No. NSC95-2120-M-006-004, Taiwan SPIN Research Center under No. 95-EC-17-A-01-S1-026, and Micro-Nano Technology Research Center of National Cheng Kung University. The authors would like to give thanks to Professor W. C. Chang and C. H. Chiu for kind assistance in using the vibrating sample magnetometer.",
year = "2007",
doi = "10.1063/1.2748860",
language = "English",
volume = "101",
journal = "Journal of Applied Physics",
issn = "0021-8979",
publisher = "American Institute of Physics Publising LLC",
number = "12",
}