Dissolution of nanosize CuO in the chemical mechanical planarization (CMP) waste water in the presence of micropores (0.74 nm) of Y and mesopores (4 nm) of MCM-41 has been studied by X-ray absorption near edge structure (XANES) spectroscopy in the present work. Since pore openings of Y and MCM-41 are much less than the size of nano-CuO (about 13 nm) in the CMP waste water, CuO is not able to be incorporated directly into the pore systems. At least two reaction paths might be involved in the incorporation process: (1) dissolution of CuO and (2) incorporation of Cu2+ into Y and MCM-41. Experimentally, during the incorporation process, Y might possess equivalent electric fields of 20-50 V/cm for dissolution of nanosize CuO. Interestingly we found that dissolution of nanosize CuO in the CMP waste water was enhanced, for instance, about 65% and 87% of nanosize CuO were incorporated (as Cu2+) and incorporated into Y and MCM-41, respectively.
|頁（從 - 到）||217-219|
|期刊||Journal of Electron Spectroscopy and Related Phenomena|
|出版狀態||Published - 2007 五月|
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