TY - JOUR
T1 - Enhanced dissolution of nanosize CuO in the presence of meso- and micro-pores
AU - Huang, Chien Hua
AU - Wang, H. Paul
AU - Huang, Hsin Liang
AU - Hsiung, Tung Li
AU - Tang, F. C.
N1 - Funding Information:
The financial support of the National Science Council and NSRRC, Taiwan is gratefully acknowledged. We also thank Dr. J.-F. Lee of the NSRRC for their XANES experimental assistances.
Copyright:
Copyright 2008 Elsevier B.V., All rights reserved.
PY - 2007/5
Y1 - 2007/5
N2 - Dissolution of nanosize CuO in the chemical mechanical planarization (CMP) waste water in the presence of micropores (0.74 nm) of Y and mesopores (4 nm) of MCM-41 has been studied by X-ray absorption near edge structure (XANES) spectroscopy in the present work. Since pore openings of Y and MCM-41 are much less than the size of nano-CuO (about 13 nm) in the CMP waste water, CuO is not able to be incorporated directly into the pore systems. At least two reaction paths might be involved in the incorporation process: (1) dissolution of CuO and (2) incorporation of Cu2+ into Y and MCM-41. Experimentally, during the incorporation process, Y might possess equivalent electric fields of 20-50 V/cm for dissolution of nanosize CuO. Interestingly we found that dissolution of nanosize CuO in the CMP waste water was enhanced, for instance, about 65% and 87% of nanosize CuO were incorporated (as Cu2+) and incorporated into Y and MCM-41, respectively.
AB - Dissolution of nanosize CuO in the chemical mechanical planarization (CMP) waste water in the presence of micropores (0.74 nm) of Y and mesopores (4 nm) of MCM-41 has been studied by X-ray absorption near edge structure (XANES) spectroscopy in the present work. Since pore openings of Y and MCM-41 are much less than the size of nano-CuO (about 13 nm) in the CMP waste water, CuO is not able to be incorporated directly into the pore systems. At least two reaction paths might be involved in the incorporation process: (1) dissolution of CuO and (2) incorporation of Cu2+ into Y and MCM-41. Experimentally, during the incorporation process, Y might possess equivalent electric fields of 20-50 V/cm for dissolution of nanosize CuO. Interestingly we found that dissolution of nanosize CuO in the CMP waste water was enhanced, for instance, about 65% and 87% of nanosize CuO were incorporated (as Cu2+) and incorporated into Y and MCM-41, respectively.
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U2 - 10.1016/j.elspec.2006.11.055
DO - 10.1016/j.elspec.2006.11.055
M3 - Article
AN - SCOPUS:34247095499
VL - 156-158
SP - 217
EP - 219
JO - Journal of Electron Spectroscopy and Related Phenomena
JF - Journal of Electron Spectroscopy and Related Phenomena
SN - 0368-2048
ER -