The surface enhanced Raman spectroscopy (SERS) substrates were fabricated by many methods including the AAO molding and high-cost nanolithography-etching-deposition process. In this article, we have demonstrated the SERS substrate fabricated with silver nanoparticles (Ag-NP) electroless deposition on highly ordered dense hexagonal arrays of UV curable resin nanorods (R-NR) arrays which was reproducible from a precisely controlled anodic aluminum oxide (AAO) template. This method could improve the non-flatness induced defect problem in the conventional nanoimprinting technique and form high-quality duplications of nanometer templates. The periodic hierarchical double-structured nanorods arrays with small nanorods (diameter about 30~40 nm) in large nanorods (diameter about 100~110 nm) were obtained by the UV curable resins molding from the AAO template. Two kinds of electroless deposition i.e. self-assembly and ultrasonic vibration methods were performed for Ag-NP formation on R-NR. The enhancement factors of SERS using 10−5 M methylene blue (MB) as probing molecules were 104~106 for the self-assembled method and 105~107 for the ultrasonic vibration one, respectively. This was because the ultrasonic vibration deposition could result in Ag nanorods arrays with higher regularity and contact area than the self-assembly one.
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