Equipment managemant method

Fan-Tien Cheng (Inventor)

研究成果: Patent

摘要

An equipment management method for managing semiconductor equipment via an equipment manager. In the equipment management method, production scenario rules and equipment behavior rules are first defined respectively in a production scenario database of a configuration controller and an equipment behavior database of an equipment driver. Them, a command is received from a manufacturing execution system (MES), and is converted into a production process scenario by looking up the corresponding production scenario rule in the production scenario database. Thereafter, the production process scenario is converted into a GEI (generic equipment interface) message with a GEI message specification, and the GEI message is transmitted to the equipment driver.
原文Chinese
專利號7003367
出版狀態Published - 2003 十一月 6

引用此

Cheng, F-T. (2003). Equipment managemant method. (專利號 7003367).