Equivalent strengths for reliability assessment of MEMS structures

Kuo Shen Chen, Kuang Shun Ou

研究成果: Article同行評審

15 引文 斯高帕斯(Scopus)

摘要

The scattering and inconsistency of tested strength of brittle microelectromechanical systems (MEMS) materials imposes a critical obstacle for structural reliability assessment of MEMS devices. In this article, the nature of such a discrepancy and the effort to solve this issue are discussed. A method based on equal failure probability is proposed to map the material strength obtained from test specimens to the equivalent strength for MEMS structural design. This conversion can be classified into three types to deal with difference in size, geometry, and applied loadings manner and the possible approach to form a material strength database for brittle MEMS material is suggested. The weakest link theory and Weibull statistics are adapted for illustrating the proposed data reduction process. Several examples are provided to illustrate the possible applications of this work. Finally, an equivalent safety factor concept is proposed to promote probabilistic structural design and the perspective to achieve a MEMS material strength database is discussed.

原文English
頁(從 - 到)163-174
頁數12
期刊Sensors and Actuators, A: Physical
112
發行號1
DOIs
出版狀態Published - 2004 四月 15

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 儀器
  • 凝聚態物理學
  • 表面、塗料和薄膜
  • 金屬和合金
  • 電氣與電子工程

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