A service management scheme (SMS) for semiconductor factory management systems is discussed. The SMS is proposed for the factory management systems by applying the Jini and design by Contract technologies and by developing the generic evaluator (GEV). It is suggested that SMS detects the malfunctioning of an equipment manager and sends an event notice to the factory manager. It is also suggested that GEV in the SMS archives the credit value of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit value.
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