摘要
A service management scheme (SMS) for semiconductor factory management systems is discussed. The SMS is proposed for the factory management systems by applying the Jini and design by Contract technologies and by developing the generic evaluator (GEV). It is suggested that SMS detects the malfunctioning of an equipment manager and sends an event notice to the factory manager. It is also suggested that GEV in the SMS archives the credit value of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit value.
| 原文 | English |
|---|---|
| 頁（從 - 到） | 26-40 |
| 頁數 | 15 |
| 期刊 | IEEE Robotics and Automation Magazine |
| 卷 | 11 |
| 發行號 | 1 |
| DOIs | |
| 出版狀態 | Published - 2004 三月 1 |
指紋
All Science Journal Classification (ASJC) codes
- Control and Systems Engineering
- Computer Science Applications
- Electrical and Electronic Engineering
引用此文
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Essential SMSs. / Cheng, Fan Tien; Yang, Haw Ching; Tsai, Chia Ying.
於: IEEE Robotics and Automation Magazine, 卷 11, 編號 1, 01.03.2004, p. 26-40.研究成果: Review article
TY - JOUR
T1 - Essential SMSs
AU - Cheng, Fan Tien
AU - Yang, Haw Ching
AU - Tsai, Chia Ying
PY - 2004/3/1
Y1 - 2004/3/1
N2 - A service management scheme (SMS) for semiconductor factory management systems is discussed. The SMS is proposed for the factory management systems by applying the Jini and design by Contract technologies and by developing the generic evaluator (GEV). It is suggested that SMS detects the malfunctioning of an equipment manager and sends an event notice to the factory manager. It is also suggested that GEV in the SMS archives the credit value of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit value.
AB - A service management scheme (SMS) for semiconductor factory management systems is discussed. The SMS is proposed for the factory management systems by applying the Jini and design by Contract technologies and by developing the generic evaluator (GEV). It is suggested that SMS detects the malfunctioning of an equipment manager and sends an event notice to the factory manager. It is also suggested that GEV in the SMS archives the credit value of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit value.
UR - http://www.scopus.com/inward/record.url?scp=1842731051&partnerID=8YFLogxK
UR - http://www.scopus.com/inward/citedby.url?scp=1842731051&partnerID=8YFLogxK
U2 - 10.1109/MRA.2004.1275961
DO - 10.1109/MRA.2004.1275961
M3 - Review article
AN - SCOPUS:1842731051
VL - 11
SP - 26
EP - 40
JO - IEEE Robotics and Automation Magazine
JF - IEEE Robotics and Automation Magazine
SN - 1070-9932
IS - 1
ER -