Essential SMSs

Fan Tien Cheng; Haw Ching Yang; Chia Ying Tsai

doi:10.1109/MRA.2004.1275961

Essential SMSs

Fan Tien Cheng, Haw Ching Yang, Chia Ying Tsai

製造資訊與系統研究所

研究成果: Review article

2 引文斯高帕斯（Scopus）

摘要

A service management scheme (SMS) for semiconductor factory management systems is discussed. The SMS is proposed for the factory management systems by applying the Jini and design by Contract technologies and by developing the generic evaluator (GEV). It is suggested that SMS detects the malfunctioning of an equipment manager and sends an event notice to the factory manager. It is also suggested that GEV in the SMS archives the credit value of all of the equipment managers so that the factory manager can select better equipment managers for service by checking their credit value.

原文	English
頁（從 - 到）	26-40
頁數	15
期刊	IEEE Robotics and Automation Magazine
卷	11
發行號	1
DOIs	https://doi.org/10.1109/MRA.2004.1275961
出版狀態	Published - 2004 三月 1

指紋

All Science Journal Classification (ASJC) codes

Control and Systems Engineering
Computer Science Applications
Electrical and Electronic Engineering

引用此

Cheng, F. T., Yang, H. C., & Tsai, C. Y. (2004). Essential SMSs. IEEE Robotics and Automation Magazine, 11(1), 26-40. https://doi.org/10.1109/MRA.2004.1275961

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存取文件

10.1109/MRA.2004.1275961