Excimer laser three-dimensional micromachining based on image projection and the optical diffraction effect

Yu Hsuan Hung, Hung Liang Chien, Yung Chun Lee

研究成果: Article同行評審

5 引文 斯高帕斯(Scopus)

摘要

An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.

原文English
文章編號1690
期刊Applied Sciences (Switzerland)
8
發行號9
DOIs
出版狀態Published - 2018 9月 18

All Science Journal Classification (ASJC) codes

  • 一般材料科學
  • 儀器
  • 一般工程
  • 製程化學與技術
  • 電腦科學應用
  • 流體流動和轉移過程

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