Excimer laser three-dimensional micromachining based on image projection and the optical diffraction effect

Yu Hsuan Hung, Hung Liang Chien, Yung-Chun Lee

研究成果: Article

3 引文 (Scopus)

摘要

An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.

原文English
文章編號1690
期刊Applied Sciences (Switzerland)
8
發行號9
DOIs
出版狀態Published - 2018 九月 18

指紋

Micromachining
Excimer lasers
micromachining
excimer lasers
Masks
laser machining
polycarbonate
masks
Diffraction
projection
Machining
diffraction
microstructure
Microstructure
polycarbonates
Polycarbonates
machining
preparation
Lasers
Substrates

All Science Journal Classification (ASJC) codes

  • Materials Science(all)
  • Instrumentation
  • Engineering(all)
  • Process Chemistry and Technology
  • Computer Science Applications
  • Fluid Flow and Transfer Processes

引用此文

@article{beecac8d477044c6bb4693f5aeb9b714,
title = "Excimer laser three-dimensional micromachining based on image projection and the optical diffraction effect",
abstract = "An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.",
author = "Hung, {Yu Hsuan} and Chien, {Hung Liang} and Yung-Chun Lee",
year = "2018",
month = "9",
day = "18",
doi = "10.3390/app8091690",
language = "English",
volume = "8",
journal = "Applied Sciences (Switzerland)",
issn = "2076-3417",
publisher = "Multidisciplinary Digital Publishing Institute (MDPI)",
number = "9",

}

TY - JOUR

T1 - Excimer laser three-dimensional micromachining based on image projection and the optical diffraction effect

AU - Hung, Yu Hsuan

AU - Chien, Hung Liang

AU - Lee, Yung-Chun

PY - 2018/9/18

Y1 - 2018/9/18

N2 - An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.

AB - An excimer laser three-dimensional (3D) micromachining system is proposed based on a mask image projection method and the optical diffraction effect. The effects of optical diffraction on the laser machining rate are evaluated using a hole-arrayed mask pattern with various feature sizes and hole-area opening ratios. The practical feasibility of the proposed method is demonstrated by machining conical, trihedral, and pyramidal 3D microstructures on polycarbonate substrates. The proposed method greatly simplifies the photo-mask design and preparation task in traditional excimer laser 3D micromachining systems and provides a powerful technique for achieving large-area 3D microstructures with complex patterns and atypical profiles.

UR - http://www.scopus.com/inward/record.url?scp=85053634358&partnerID=8YFLogxK

UR - http://www.scopus.com/inward/citedby.url?scp=85053634358&partnerID=8YFLogxK

U2 - 10.3390/app8091690

DO - 10.3390/app8091690

M3 - Article

AN - SCOPUS:85053634358

VL - 8

JO - Applied Sciences (Switzerland)

JF - Applied Sciences (Switzerland)

SN - 2076-3417

IS - 9

M1 - 1690

ER -