Fabrication and application of GaAs-on-insulator structure prepared through liquid-phase chemical-enhanced oxidation

Yi Shiang Chen, Ching Yi Kao, Kuan Wei Lee, Yeong Her Wang

研究成果: Article同行評審

摘要

This paper details the fabrication and characteristics of Schottky-gate InGaP/InGaAs pseudomorphic high-electron-mobility transistors (PHEMTs) with GaAs-on-insulator (GOI) structure obtained using liquid-phase chemical-enhanced oxidation (LPCEO). Two oxidation times were investigated, and the PHEMT with GOI structure prepared through 15 min of LPCEO was discovered to have improved subthreshold characteristics, suppressed gate leakage current density, larger breakdown voltage, and less low-frequency noise owing to the isolated oxide film. Therefore, the proposed PHEMT with GOI structure prepared through LPCEO is promising for group III-V compound device applications.

原文English
文章編號109007
期刊Vacuum
171
DOIs
出版狀態Published - 2020 一月

All Science Journal Classification (ASJC) codes

  • Instrumentation
  • Condensed Matter Physics
  • Surfaces, Coatings and Films

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