TY - GEN
T1 - Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method
AU - Lee, Yung Chun
AU - Wu, Chun Ying
PY - 2006
Y1 - 2006
N2 - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Two different microlenses with spherical and aspheric surfaces profiles with dimension less than 200 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.
AB - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Two different microlenses with spherical and aspheric surfaces profiles with dimension less than 200 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.
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U2 - 10.4028/0-87849-990-3.67
DO - 10.4028/0-87849-990-3.67
M3 - Conference contribution
AN - SCOPUS:35348858952
SN - 0878499903
SN - 9780878499908
T3 - Materials Science Forum
SP - 67
EP - 72
BT - Progress on Advanced Manufacture for Micro/Nano Technology 2005 - Proceedings of the 2005 International Conference on Advanced Manufacture
PB - Trans Tech Publications Ltd
T2 - 2005 International Conference on Advanced Manufacture, ICAM2005
Y2 - 28 November 2005 through 2 December 2005
ER -