Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

研究成果: Conference contribution

3 引文 (Scopus)

摘要

This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

原文English
主出版物標題TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers
頁面1375-1379
頁數5
出版狀態Published - 2005 十一月 10
事件13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05 - Seoul, Korea, Republic of
持續時間: 2005 六月 52005 六月 9

出版系列

名字Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05
2

Other

Other13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05
國家Korea, Republic of
城市Seoul
期間05-06-0505-06-09

指紋

Microlenses
Excimer lasers
Scanning
Fabrication
Micromachining
Microoptics
Microstructure
Polycarbonates
Masks
Machining
Surface roughness

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Lee, Y. C., Wu, C. Y., Jang, L. S., & Hsu, Y. C. (2005). Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. 於 TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers (頁 1375-1379). [3E4.20] (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; 卷 2).
Lee, Yung Chun ; Wu, Chun Ying ; Jang, Ling Sheng ; Hsu, Yi Chu. / Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. 頁 1375-1379 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).
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Lee, YC, Wu, CY, Jang, LS & Hsu, YC 2005, Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. 於 TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers., 3E4.20, Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05, 卷 2, 頁 1375-1379, 13th International Conference on Solid-State Sensors and Actuators and Microsystems, TRANSDUCERS '05, Seoul, Korea, Republic of, 05-06-05.

Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. / Lee, Yung Chun; Wu, Chun Ying; Jang, Ling Sheng; Hsu, Yi Chu.

TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1375-1379 3E4.20 (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05; 卷 2).

研究成果: Conference contribution

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T1 - Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

AU - Lee, Yung Chun

AU - Wu, Chun Ying

AU - Jang, Ling Sheng

AU - Hsu, Yi Chu

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N2 - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

AB - This paper presents a new method for fabricating 3D microstructures with an excimer laser micromachining system. A novel mask contour scanning method is developed for obtaining precise 3D microstructures with pre-described continuous surface profile. Five different microlenses with spherical and parabolic surfaces profiles with dimension less than 500 μm are fabricated on polycarbonate (PC) samples. The surface profiles are measured and compared with their theoretical counterparts. Excellent agreements both in profile shapes and dimensions are achieved. The surface roughness (Ra) of the machined surfaces is also measured and is less than 10 nm. The machining profile accuracy and surface smoothness of this proposed micromachining method show great potentials in fabricating micro-optic components such as aspheric microlenses or microlens arrays.

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Lee YC, Wu CY, Jang LS, Hsu YC. Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method. 於 TRANSDUCERS '05 - 13th International Conference on Solid-State Sensors and Actuators and Microsystems - Digest of Technical Papers. 2005. p. 1375-1379. 3E4.20. (Digest of Technical Papers - International Conference on Solid State Sensors and Actuators and Microsystems, TRANSDUCERS '05).