Fabrication and characterization of 3D aspheric microlenses with arbitrary surface profiles based on a novel excimer laser contour scanning method

Keyphrases

• Arbitrary Surface 100%
• Contour Scanning 100%
• Scanning Method 100%
• 3D Microstructure 50%
• Profile Accuracy 25%
• Surface Roughness Ra 25%
• Machined Surface 25%
• Profile Shape 25%
• Aspheric Surface 25%
• Microlens Array 25%
• Optical Components 25%
• Microlenses Array 25%
• Surface Smoothness 25%
• Spherical Surface 25%
• Continuous Surface 25%
• Excimer Laser Micromachining 25%

Engineering

• Micro-Lens Array 25%
• Aspheric Surface 25%
• Machined Surface 25%
• Spherical Surface 25%