Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno; Kay Nottmeyer; Cleopatra Cabuz; Takashi Kobayashi; Masayoshi Esashi

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

Jun Mizuno, Kay Nottmeyer, Cleopatra Cabuz, Takashi Kobayashi, Masayoshi Esashi

智慧與永續製造學位學程

研究成果: Paper › 同行評審

4 引文斯高帕斯（Scopus）

摘要

A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

原文	English
頁面	679-682
頁數	4
出版狀態	Published - 1995
事件	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) - Stockholm, Sweden 持續時間: 1995 6月 25 → 1995 6月 29

Conference

Conference	Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)
城市	Stockholm, Sweden
期間	95-06-25 → 95-06-29

All Science Journal Classification (ASJC) codes

一般工程

其它文件與鏈接

Link to publication in Scopus

引用此

Mizuno, J., Nottmeyer, K., Cabuz, C., Kobayashi, T., & Esashi, M. (1995). Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. 679-682. 論文發表於 Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

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title = "Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate",

abstract = "A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.",

author = "Jun Mizuno and Kay Nottmeyer and Cleopatra Cabuz and Takashi Kobayashi and Masayoshi Esashi",

year = "1995",

language = "English",

pages = "679--682",

note = "Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2) ; Conference date: 25-06-1995 Through 29-06-1995",

}

Mizuno, J, Nottmeyer, K, Cabuz, C, Kobayashi, T & Esashi, M 1995, 'Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate', 論文發表於 Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden, 95-06-25 - 95-06-29 頁 679-682.

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate. / Mizuno, Jun; Nottmeyer, Kay; Cabuz, Cleopatra 等.
1995. 679-682 論文發表於 Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2), Stockholm, Sweden.

研究成果: Paper › 同行評審

TY - CONF

T1 - Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

AU - Mizuno, Jun

AU - Nottmeyer, Kay

AU - Cabuz, Cleopatra

AU - Kobayashi, Takashi

AU - Esashi, Masayoshi

PY - 1995

Y1 - 1995

N2 - A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

AB - A silicon micromachined structure 1 cm × 2 cm in size was designed and fabricated, which can detect linear acceleration g and angular rate ω simultaneously and independently. This is accomplished by capacitive detection of a) the displacement due to acceleration and b) the tilt due to centrifugal forces of two seismic masses symmetrically suspended by torsion bars. The ratio of the respective sensitivities to acceleration g and angular rate ω can be adjusted through the dimensions and the shape of the torsion bars.

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M3 - Paper

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T2 - Proceedings of the 1995 8th International Conference on Solid-State Sensors and Actuators and Eurosensors IX. Part 1 (of 2)

Y2 - 25 June 1995 through 29 June 1995

ER -

Fabrication and characterization of a silicon capacitive structure for simultaneous detection of acceleration and angular rate

摘要

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All Science Journal Classification (ASJC) codes

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