Fabrication and design of a heat transfer micro-channel system by a low temperature MEMS technique

H. S. Ko, C. W. Liu, C. Gau, C. S. Yang

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)


This work describes a low temperature fabrication technique for a micro-channel configuration that is integrated with an array of temperature sensors and micro-heaters. This channel configuration can be used to study the micro-scale heat transfer process in the channels. The low temperature fabrication process enables the use of low thermal conductivity material for forming the channel walls. This can provide a uniform heat flux boundary condition due to adequate insulation for reducing both the heat loss from the channel to the surrounding ambient and the streamwise conduction. In addition, the wall roughness of the micro-channel is minimized by a special wet etch process. Therefore, more accurate local heat transfer data along the channel can be obtained, which provides entry length heat transfer information for the first time in the literature. Design consideration and fabrication techniques used in this study are explained. Final measurements for validation of the fabricated heaters and sensors are presented. The paper also presents averaged heat transfer which is compared with available data. Discrepancies between different works can be clarified.

頁(從 - 到)983-993
期刊Journal of Micromechanics and Microengineering
出版狀態Published - 2007 五月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 材料力學
  • 機械工業
  • 電氣與電子工程


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