TY - JOUR
T1 - Fabrication and function examination of PZT-based MEMS accelerometers
AU - Lee, Yi Chia
AU - Tsai, Cheng Che
AU - Li, Cheng Ying
AU - Liou, Yu Cheng
AU - Hong, Cheng Shong
AU - Chu, Sheng Yuan
N1 - Funding Information:
We gratefully acknowledge the financial support provided from the Ministry of Science and Technology ( MOST ), Taiwan, R.O.C. (Grant numbers: 108-2221-E-272 -001 -MY2 , MOST 109-2218-E-006 -027 ).
Publisher Copyright:
© 2021 Elsevier Ltd and Techna Group S.r.l.
PY - 2021/9/1
Y1 - 2021/9/1
N2 - In this study, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)0.98Nb0.02O3 (PNZT) piezoelectric thick films. By preparing Pb(Zr0.52Ti0.48)0.98Nb0·02O3 sol-gel solutions and mixing them with PZT-5A piezoelectric powders, therefore, the thickness of single layer coating can be increased and reduce the risk of film cracks. The proposed PNZT films have the dielectric constant of 1750, dielectric loss of 0.063, remnant polarization of 58 μC/cm2, and d33 of 133 p.m./V. Piezoelectric cantilever beam MEMS accelerometers were then designed, simulated and fabricated via photolithography methods on Si substrates. The sensitivity and natural frequency of the cantilever beam accelerometer are 16.8 mV/g and 200Hz, respectively. Finally, a cantilever beam accelerometer is successfully applied for the server hard-drive fault detection.
AB - In this study, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)0.98Nb0.02O3 (PNZT) piezoelectric thick films. By preparing Pb(Zr0.52Ti0.48)0.98Nb0·02O3 sol-gel solutions and mixing them with PZT-5A piezoelectric powders, therefore, the thickness of single layer coating can be increased and reduce the risk of film cracks. The proposed PNZT films have the dielectric constant of 1750, dielectric loss of 0.063, remnant polarization of 58 μC/cm2, and d33 of 133 p.m./V. Piezoelectric cantilever beam MEMS accelerometers were then designed, simulated and fabricated via photolithography methods on Si substrates. The sensitivity and natural frequency of the cantilever beam accelerometer are 16.8 mV/g and 200Hz, respectively. Finally, a cantilever beam accelerometer is successfully applied for the server hard-drive fault detection.
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U2 - 10.1016/j.ceramint.2021.05.161
DO - 10.1016/j.ceramint.2021.05.161
M3 - Article
AN - SCOPUS:85107884200
SN - 0272-8842
VL - 47
SP - 24458
EP - 24465
JO - Ceramics International
JF - Ceramics International
IS - 17
ER -