Fabrication and function examination of PZT-based MEMS accelerometers

Yi Chia Lee, Cheng Che Tsai, Cheng Ying Li, Yu Cheng Liou, Cheng Shong Hong, Sheng Yuan Chu

研究成果: Article同行評審

14 引文 斯高帕斯(Scopus)


In this study, a hybrid sol-gel method was used to fabricate Pb(Zr0.52Ti0.48)0.98Nb0.02O3 (PNZT) piezoelectric thick films. By preparing Pb(Zr0.52Ti0.48)0.98Nb0·02O3 sol-gel solutions and mixing them with PZT-5A piezoelectric powders, therefore, the thickness of single layer coating can be increased and reduce the risk of film cracks. The proposed PNZT films have the dielectric constant of 1750, dielectric loss of 0.063, remnant polarization of 58 μC/cm2, and d33 of 133 p.m./V. Piezoelectric cantilever beam MEMS accelerometers were then designed, simulated and fabricated via photolithography methods on Si substrates. The sensitivity and natural frequency of the cantilever beam accelerometer are 16.8 mV/g and 200Hz, respectively. Finally, a cantilever beam accelerometer is successfully applied for the server hard-drive fault detection.

頁(從 - 到)24458-24465
期刊Ceramics International
出版狀態Published - 2021 9月 1

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 陶瓷和複合材料
  • 製程化學與技術
  • 表面、塗料和薄膜
  • 材料化學


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