Fabrication metal roller mold with sub-micrometer feature size based on contact printing photolithography

Kuo Feng Huang, Sung Wen Tsai, Yung-Chun Lee

研究成果: Conference contribution

摘要

This paper presents an innovative approach for directly forming surface micro-structures at sub-micrometer scale on the cylindrical surface of a metal roller. This roller can then serve as a roller mold in roller imprinting processes for large-area micro/nano-fabrication. The key element in this roller mold fabrication mold processes is a new type of contact-printing method with can transfer a patterned metal film from a planar mold to a thin photo-resist layer coated on the roller's cylindrical surface. The pattern definition capability can easily reach sub-micrometer or nanometer over a large patterning area. Subsequent ultraviolet light exposure patterned surface micro-structures with sub-micrometer-scaled feature sizes can be directly formed on the roller's surface by either metal etching or metal deposition.

原文English
主出版物標題2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
頁面31-35
頁數5
DOIs
出版狀態Published - 2012 六月 1
事件7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012 - Kyoto, Japan
持續時間: 2012 三月 52012 三月 8

出版系列

名字2012 7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012

Other

Other7th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2012
國家Japan
城市Kyoto
期間12-03-0512-03-08

All Science Journal Classification (ASJC) codes

  • Engineering (miscellaneous)

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