This paper reports on the fabrication of barium titanate (BaTiO 3) thin films using a precursor solution containing Ba and Ti alkoxides. l-proline was used to prevent the precipitation of Ba and Ti alkoxides in a mixed solvent of ethanol and butylcarbitol under ambient conditions. Analysis of X-ray diffraction and Raman spectra revealed that the as-deposited amorphous film crystallized into a tetragonal BaTiO3 phase after annealing at 650°C in air. Scanning electron microscopic observations showed that the BaTiO3 film was free from cracks even after annealing and exhibited good adhesion to the substrate. Because the precursor solution developed was sufficiently stable in air, dot patterning of BaTiO3 was also performed using an inkjet system.
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