Fabrication of bismuth nanowire devices using focused ion beam milling

H. H. Cheng, M. M. Alkaisi, S. E. Wu, C. P. Liu

研究成果: Conference contribution

2 引文 斯高帕斯(Scopus)

摘要

In this work, a focused ion beam (FIB) milling process has been developed to fabricate 50nm Bi nanowire and transistor structures using FEI-200 dual beam FIB system. For the fabrication, 50nm bismuth film was thermally evaporated through EBL patterned PMMA windows onto SiO2 substrates with pre-defined contact pads. Bi nanowire widths ranging from 30nm to 100nm have been successfully fabricated by milling out unwanted areas using 30KeV Ga+ ion beam. A single-pixel-line ion beam blanking technique has been utilised to fabricate Bi nanowire as small as 30nm in diameter and few micrometers long. In order to form good ohmic contacts for sub 50nm bismuth nanowires, a drilland- fill process has been developed using FIB to sputter away the surface oxide of bismuth after the in-situ platinum nanowire contacts deposition. To our knowledge, this is the first time a focused ion beam process has been used to fabricate bismuth nanowire. The fabricated Bi nanowires were electrically characterised using a semiconductor analyzer that showed good ohmic contact to the electrodes. In this paper, the fabrication experiments and the characterization results for Bi nanowires as small as 50nm in diameter are presented. Several FIB issues involved in Bi device making and ohmic contacts to Bi nanowires will also be discussed.

原文English
主出版物標題Advanced Materials and Nanotechnology - Proceedings of the International Conference (AMN-4)
頁面48-51
頁數4
DOIs
出版狀態Published - 2009 十一月 25
事件4th International Conference on Advanced Materials and Nanotechnology, AMN-4 - Dunedin, New Zealand
持續時間: 2009 二月 82009 二月 12

出版系列

名字AIP Conference Proceedings
1151
ISSN(列印)0094-243X
ISSN(電子)1551-7616

Other

Other4th International Conference on Advanced Materials and Nanotechnology, AMN-4
國家New Zealand
城市Dunedin
期間09-02-0809-02-12

    指紋

All Science Journal Classification (ASJC) codes

  • Physics and Astronomy(all)

引用此

Cheng, H. H., Alkaisi, M. M., Wu, S. E., & Liu, C. P. (2009). Fabrication of bismuth nanowire devices using focused ion beam milling. 於 Advanced Materials and Nanotechnology - Proceedings of the International Conference (AMN-4) (頁 48-51). (AIP Conference Proceedings; 卷 1151). https://doi.org/10.1063/1.3203244