TY - JOUR
T1 - Fabrication of diamond micro-structures by ink-jet printed diamond seeding and microwave plasma assisted chemical vapor deposition
AU - Chen, Yu Chun
AU - Tzeng, Yonhua
AU - Davray, Ahbishek
AU - Cheng, An Jen
AU - Ramadoss, Ramesh
AU - Park, Minseo
PY - 2008/4
Y1 - 2008/4
N2 - Ink-jet printing has the advantage of easy formation of micro-patterns on rigid as well as flexible surfaces without needing conventional lithographic processes. By means of printing in selected areas, diamond seeding in designed patterns and areas is achieved. Properly designed ink with a desirable composition helps the formation of patterned structures with tailored functions. Ink containing nano-diamond particles was designed and used to print micro-structures, which were applied for further CVD growth of diamond by means of microwave plasma CVD. Promising applications of this technique are discussed.
AB - Ink-jet printing has the advantage of easy formation of micro-patterns on rigid as well as flexible surfaces without needing conventional lithographic processes. By means of printing in selected areas, diamond seeding in designed patterns and areas is achieved. Properly designed ink with a desirable composition helps the formation of patterned structures with tailored functions. Ink containing nano-diamond particles was designed and used to print micro-structures, which were applied for further CVD growth of diamond by means of microwave plasma CVD. Promising applications of this technique are discussed.
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U2 - 10.1016/j.diamond.2008.01.021
DO - 10.1016/j.diamond.2008.01.021
M3 - Article
AN - SCOPUS:42949169078
SN - 0925-9635
VL - 17
SP - 722
EP - 727
JO - Diamond and Related Materials
JF - Diamond and Related Materials
IS - 4-5
ER -