Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka; J. Mizuno; T. Harada; S. Shoji

Fabrication of fine plastic microchannel by using hot embossing

M. Ishizuka, J. Mizuno, T. Harada, S. Shoji

智慧與永續製造學位學程

研究成果: Paper › 同行評審

摘要

Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

原文	English
頁面	303-307
頁數	5
出版狀態	Published - 2004
事件	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium - Honolulu, HI, United States 持續時間: 2004 10月 3 → 2004 10月 8

Conference

Conference	Microfabricated Systems and MEMS VII - Proceedings of the International Symposium
國家/地區	United States
城市	Honolulu, HI
期間	04-10-03 → 04-10-08

All Science Journal Classification (ASJC) codes

一般工程

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引用此

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title = "Fabrication of fine plastic microchannel by using hot embossing",

abstract = "Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.",

author = "M. Ishizuka and J. Mizuno and T. Harada and S. Shoji",

year = "2004",

language = "English",

pages = "303--307",

note = "Microfabricated Systems and MEMS VII - Proceedings of the International Symposium ; Conference date: 03-10-2004 Through 08-10-2004",

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T1 - Fabrication of fine plastic microchannel by using hot embossing

AU - Ishizuka, M.

AU - Mizuno, J.

AU - Harada, T.

AU - Shoji, S.

PY - 2004

Y1 - 2004

N2 - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

AB - Fine plastic micorchannels were fabricated by hot embossing of PMMA substrates. To realize rectangular cross sectional channel structure, silicon molds having ridge structures fabricated by Deep-RIE was employed. The hot embossing condition such as the temperature, applied pressure and time was also carefully optimized. The embossing technique was also applied for the fabrication of other plastic microchannels such as fluororesin.

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UR - http://www.scopus.com/inward/citedby.url?scp=17044410496&partnerID=8YFLogxK

M3 - Paper

AN - SCOPUS:17044410496

SP - 303

EP - 307

T2 - Microfabricated Systems and MEMS VII - Proceedings of the International Symposium

Y2 - 3 October 2004 through 8 October 2004

ER -

Fabrication of fine plastic microchannel by using hot embossing

摘要

Conference

All Science Journal Classification (ASJC) codes

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