Fabrication of garnet solid electrolytes via sputtering for solid-state batteries

研究成果: Article同行評審


In this study, the deposition of Li7La3Zr2O12 (LLZO) thin films onto MgO substrates was successfully achieved using the radio frequency magnetron sputtering technique. The deposition process was carried out at various substrate temperatures to investigate their influence on the film properties The as-deposited films were initially amorphous; however, they could be crystallized into the cubic phase by increasing the deposition temperature above 100 °C. Upon raising the deposition temperature to 200 °C, the peaks in the X-ray diffraction pattern became sharper and more intense, indicating an increase in the volume fraction and crystallite size of LLZO. At 200 °C, the film consisted predominantly of the conductive crystalline LLZO phase, resulting in a remarkably high ionic conductivity of about 10−4 S cm−1. The film deposited at 300 °C exhibited the second phase, i.e., the La2Zr2O7 phase, which resulted from excessive lithium losses. These findings highlight the importance of controlling the deposition temperature to achieve the desired crystalline phase and optimize the electrical properties of LLZO thin films.

期刊Solid-State Electronics
出版狀態Published - 2024 5月

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 材料化學
  • 電氣與電子工程


深入研究「Fabrication of garnet solid electrolytes via sputtering for solid-state batteries」主題。共同形成了獨特的指紋。