Fabrication of insulating micropatterns for inner electrode of multilayer ceramic capacitor by electrophoretic deposition based on SiO2 nanopowder

Sheng Chang Wang, Ya Hwang Cheng, Jow Lay Huang

研究成果: Conference article

摘要

Micropatterns of silica were fabricated on interdigitated array (IDA) electrode used to be the insulting layer of inner electrode of multilayer ceramic capacitor (MLCC) by electrophoretic deposition. A three-electrode circuit system was applied to deposit the silica nanoparticle on the silver IDA electrode. The three-electrode system shows better deposition selectively of interval. Smaller IDA electrode spacing performed faster deposition rate and lower applied voltage. A crack-free film of silica was deposited at 10 V applied voltage for 20 s and sintered at 800°C. The resistance of micropattern film is 7 × 109 ohm. The adhesion between silica layer and electrode was improved after sintering.

原文English
頁(從 - 到)528-533
頁數6
期刊Procedia Engineering
36
DOIs
出版狀態Published - 2012 一月 1
事件2011 IUMRS International Conference in Asia, ICA 2011 - Taipei, Taiwan
持續時間: 2011 九月 192011 九月 22

All Science Journal Classification (ASJC) codes

  • Engineering(all)

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