Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate

Jhih Nan Yan, Yung Chun Lee

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

指紋

深入研究「Fabrication of metal embedded photo-mask for sub-micrometer scaled photolithography and patterning sapphire substrate」主題。共同形成了獨特的指紋。

Engineering & Materials Science