Fabrication of NOx gas sensors using In2O 3-ZnO composite thin films

Chia Yu Lin, Yueh Yuan Fang, Chii Wann Lin, Craig A. Jeffrey, James J. Tunney, Kuo Chuan Ho

研究成果: Conference contribution

摘要

In2O3-ZnO composite thin films were fabricated and their NOx sensing characteristics were investigated in this study. The content of ZnO in In2O3-ZnO thin film was controlled by adjusting the Zn2+/In3+ molar ratio (r) during the film preparation. The results showed that the incorporation of ZnO into the In 2O3 thin film can greatly improve the sensor reponse to NOx at operation temperature below 200 oC. However, as the ZnO content was further increased, the grain of the composite film started to merge into big ones, and thus decreased the surface area, resulting in lower sensor responses. The detection limit (S/N=3) of In2O3-ZnO composite film (r=0.67) reached 12 ppb at 150 °C. Both pure In2O3 and In2O3-ZnO composit films (r=0.67) showed no response to CO gas.

原文English
主出版物標題Olfaction and Electronic Nose - Proceedings of the 13th International Symposium on Olfaction and Electronic Nose, ISOEN
頁面384-387
頁數4
DOIs
出版狀態Published - 2009
事件13th International Symposium on Olfaction and Electronic Nose, ISOEN - Brescia, Italy
持續時間: 2009 四月 152009 四月 17

出版系列

名字AIP Conference Proceedings
1137
ISSN(列印)0094-243X
ISSN(電子)1551-7616

Other

Other13th International Symposium on Olfaction and Electronic Nose, ISOEN
國家/地區Italy
城市Brescia
期間09-04-1509-04-17

All Science Journal Classification (ASJC) codes

  • 物理與天文學 (全部)

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