Fabrication of PZT thick film on platinum-coated silicon substrate by an improved sol-gel deposition method

Chun I. Lin, Yung-Chun Lee

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

This article has proposed the fabrication of thick films of lead zirconate titanate (PZT) on a Pt/Ti/SiO2/Si substrate using an improved sol-gel method. To achieve thicker PZT films within reasonable working time, this paper adopts sol-gel coating method but using PZT slurry which contains well dispersed and ball-milled sub-micrometer PZT powders in a sol-gel precursor solution. The PZT slurry is then spin-coated onto a substrate followed by pyrolysis thermal treatments. To enhancing the PZT film qualities, an improved vacuum infiltration treatment has been implemented in addition to conventional sol-gel coating and thermal processing. With the above-mentioned improvements, thicker PZT films with excellent characteristics are obtained. Microstructure and cross-section have been characterized by means of scanning electron microscopy (SEM). The ferroelectric property has been also determined by the ferroelectric analyzer. Films with a thickness in the range from 2.4 m to 12.8 μm can be obtained within hours by the improved sol-gel method. When the thickness of the film is 12.8 μm, the maximum remanent polarization is 24.48 μC/cm2 and the coercive field is 122.72 kV/cm at the maximum electric field, 625kV/cm. These PZT films are ready for device applications.

原文English
主出版物標題NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
頁面567-570
頁數4
DOIs
出版狀態Published - 2011 10月 4
事件6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
持續時間: 2011 2月 202011 2月 23

出版系列

名字NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
國家/地區Taiwan
城市Kaohsiung
期間11-02-2011-02-23

All Science Journal Classification (ASJC) codes

  • 原子與分子物理與光學

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