Fabrication of seamless roller mold with excimer laser direct writing technology

Yung-Chun Lee, Pin Chang Chen, Hung Yi Lin

研究成果: Conference contribution

6 引文 (Scopus)

摘要

This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 J1m for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures.

原文English
主出版物標題4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
頁面767-770
頁數4
DOIs
出版狀態Published - 2009 十月 12
事件4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 - Shenzhen, China
持續時間: 2009 一月 52009 一月 8

出版系列

名字4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009

Other

Other4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009
國家China
城市Shenzhen
期間09-01-0509-01-08

指紋

Excimer lasers
Fabrication
Machining
Metals
High energy lasers
Glass
Thin films
Wet etching
Lasers
Molds
Pulsed lasers
Costs
Masks
Etching
Image processing
Microstructure

All Science Journal Classification (ASJC) codes

  • Electrical and Electronic Engineering

引用此文

Lee, Y-C., Chen, P. C., & Lin, H. Y. (2009). Fabrication of seamless roller mold with excimer laser direct writing technology. 於 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009 (頁 767-770). [5068691] (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068691
Lee, Yung-Chun ; Chen, Pin Chang ; Lin, Hung Yi. / Fabrication of seamless roller mold with excimer laser direct writing technology. 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. 頁 767-770 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).
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abstract = "This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 J1m for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures.",
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Lee, Y-C, Chen, PC & Lin, HY 2009, Fabrication of seamless roller mold with excimer laser direct writing technology. 於 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009., 5068691, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, 頁 767-770, 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009, Shenzhen, China, 09-01-05. https://doi.org/10.1109/NEMS.2009.5068691

Fabrication of seamless roller mold with excimer laser direct writing technology. / Lee, Yung-Chun; Chen, Pin Chang; Lin, Hung Yi.

4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 767-770 5068691 (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009).

研究成果: Conference contribution

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N2 - This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 J1m for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures.

AB - This paper presents a new method for fabricating a seamless roller mold with micrometer-scaled features based on laser direct writing approach. In the process, a glass roller is first coated with a metal thin film. A high-energy pulsed laser directly machines the metal thin film and thus defines the pattern on the roller's surface. Subsequent wet etching on the patterned roller using the residual metal layer as the etching mask completes the fabrication of seamless glass roller molds. Digital image processing techniques are incorporated into the laser machining processes so that complicated patterns can be successfully transferred. Experimental results demonstrate a smallest feature size down to 20 J1m for both linear grating and dot-array patterns. The advantages of this method are: (1). seamless patterns on roller mold, (2). good machining accuracy, (3). easiness in achieving complicated patterns, and (4). low cost. This method opens up many new directions and possibilities in the applications of roller-imprinting for continuous, large-area, and low-cost fabrication of micro-structures.

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Lee Y-C, Chen PC, Lin HY. Fabrication of seamless roller mold with excimer laser direct writing technology. 於 4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009. 2009. p. 767-770. 5068691. (4th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2009). https://doi.org/10.1109/NEMS.2009.5068691