Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film

Wen Hui Li, Hong Wei Chen, Ya Wen Hu, Yung-Chun Lee, Fei Bin Hsiao

研究成果: Conference contribution

2 引文 (Scopus)

摘要

This paper describes an innovative approach for fabricating seamless roller molds based on conventional photolithography. The fabricated seamless roller molds are then applied in a UV-curing roller imprinting process to replicate ball-lens-array microstructures on a polymer substrate, which finally forms a light-converging optical film to be used in back-light units of flat panel displays. The roller imprinting process has the advances such as quickly, low cost and large area. First of all, a method for spread coating of a thin photo-resist (PR) layer on a cylindrical surface of a metal roller is developed. This spread coating system relies on pneumatically driven air flow which squeezes through a narrow gap between a roller and an outer ring, and results in a uniformly coated thin PR layer on the cylindrical surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process, which complete the fabrication of seamless roller molds. Through UV-curable roller-imprinting, an optical film with ball-lens-array micro-structures have been fabricated and experiment results show a gain value of luminous of 1.2 has been accomplished.

原文English
主出版物標題NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems
頁面728-731
頁數4
DOIs
出版狀態Published - 2011 十月 4
事件6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011 - Kaohsiung, Taiwan
持續時間: 2011 二月 202011 二月 23

出版系列

名字NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems

Other

Other6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011
國家Taiwan
城市Kaohsiung
期間11-02-2011-02-23

指紋

rollers
curved surfaces
photolithography
lenses
optics
fabrication
microstructure
coating
balls
masks
electroforming
flat panel displays
air flow
curing
metals
light sources
alignment
etching

All Science Journal Classification (ASJC) codes

  • Atomic and Molecular Physics, and Optics

引用此文

Li, W. H., Chen, H. W., Hu, Y. W., Lee, Y-C., & Hsiao, F. B. (2011). Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. 於 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems (頁 728-731). [6017457] (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017457
Li, Wen Hui ; Chen, Hong Wei ; Hu, Ya Wen ; Lee, Yung-Chun ; Hsiao, Fei Bin. / Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. 頁 728-731 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).
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title = "Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film",
abstract = "This paper describes an innovative approach for fabricating seamless roller molds based on conventional photolithography. The fabricated seamless roller molds are then applied in a UV-curing roller imprinting process to replicate ball-lens-array microstructures on a polymer substrate, which finally forms a light-converging optical film to be used in back-light units of flat panel displays. The roller imprinting process has the advances such as quickly, low cost and large area. First of all, a method for spread coating of a thin photo-resist (PR) layer on a cylindrical surface of a metal roller is developed. This spread coating system relies on pneumatically driven air flow which squeezes through a narrow gap between a roller and an outer ring, and results in a uniformly coated thin PR layer on the cylindrical surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process, which complete the fabrication of seamless roller molds. Through UV-curable roller-imprinting, an optical film with ball-lens-array micro-structures have been fabricated and experiment results show a gain value of luminous of 1.2 has been accomplished.",
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Li, WH, Chen, HW, Hu, YW, Lee, Y-C & Hsiao, FB 2011, Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. 於 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems., 6017457, NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, 頁 728-731, 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems, NEMS 2011, Kaohsiung, Taiwan, 11-02-20. https://doi.org/10.1109/NEMS.2011.6017457

Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. / Li, Wen Hui; Chen, Hong Wei; Hu, Ya Wen; Lee, Yung-Chun; Hsiao, Fei Bin.

NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 728-731 6017457 (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems).

研究成果: Conference contribution

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AU - Li, Wen Hui

AU - Chen, Hong Wei

AU - Hu, Ya Wen

AU - Lee, Yung-Chun

AU - Hsiao, Fei Bin

PY - 2011/10/4

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N2 - This paper describes an innovative approach for fabricating seamless roller molds based on conventional photolithography. The fabricated seamless roller molds are then applied in a UV-curing roller imprinting process to replicate ball-lens-array microstructures on a polymer substrate, which finally forms a light-converging optical film to be used in back-light units of flat panel displays. The roller imprinting process has the advances such as quickly, low cost and large area. First of all, a method for spread coating of a thin photo-resist (PR) layer on a cylindrical surface of a metal roller is developed. This spread coating system relies on pneumatically driven air flow which squeezes through a narrow gap between a roller and an outer ring, and results in a uniformly coated thin PR layer on the cylindrical surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process, which complete the fabrication of seamless roller molds. Through UV-curable roller-imprinting, an optical film with ball-lens-array micro-structures have been fabricated and experiment results show a gain value of luminous of 1.2 has been accomplished.

AB - This paper describes an innovative approach for fabricating seamless roller molds based on conventional photolithography. The fabricated seamless roller molds are then applied in a UV-curing roller imprinting process to replicate ball-lens-array microstructures on a polymer substrate, which finally forms a light-converging optical film to be used in back-light units of flat panel displays. The roller imprinting process has the advances such as quickly, low cost and large area. First of all, a method for spread coating of a thin photo-resist (PR) layer on a cylindrical surface of a metal roller is developed. This spread coating system relies on pneumatically driven air flow which squeezes through a narrow gap between a roller and an outer ring, and results in a uniformly coated thin PR layer on the cylindrical surface. Secondly, a step-and-rotate UV-exposure system is constructed for transforming patterns defined by a photo-mask to the coated PR layer. Continuous and seamless patterning on the whole cylindrical surface of the roller is achieved through accurate mechanical alignment and precision rotation control of the roller as well as a parallel UV light source. Finally, using the patterned and developed PR structures as a mask, a variety of microstructures with complicated and seamless patterns can be directly fabricated on the metal roller surface by either chemical etching or electroforming process, which complete the fabrication of seamless roller molds. Through UV-curable roller-imprinting, an optical film with ball-lens-array micro-structures have been fabricated and experiment results show a gain value of luminous of 1.2 has been accomplished.

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Li WH, Chen HW, Hu YW, Lee Y-C, Hsiao FB. Fabrication of seamless roller molds using step-and-rotate curved surface photolithography and application on micro-lens array optic film. 於 NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems. 2011. p. 728-731. 6017457. (NEMS 2011 - 6th IEEE International Conference on Nano/Micro Engineered and Molecular Systems). https://doi.org/10.1109/NEMS.2011.6017457