Fabrication of sub-spot-size microchannel of microfluidic chip using CO2 laser processing with metal-film protection

Chen-Kuei Chung, T. K. Tan, S. L. Lin, K. Z. Tu, C. C. Lai

研究成果: Article同行評審

13 引文 斯高帕斯(Scopus)


CO2 laser ablation has been a popular technique for microfluidic chip fabrication but it always suffers some problems such as bulges, clogging, re-solidification and large heat-affected zone around the rim of channels and holes. In this Letter, a simple effective method for diminishing the defects has been proposed using a metal-film protection for CO2 laser ablation. Polymethylmethancrylate (PMMA) was used as a substrate to demonstrate the fabricated microfluidic channels without clogging as well as bulges reduced. The feature size of the microchannel can also distinctly be decreased from 268m in air to around 58m with metal-film-protection method, which is smaller than the laser-beam spot size. The bulge height was reduced to less than 0.2m and clogging effect in the channel junction was not occurred. ANSYS simulation was also used to analyse the temperature distribution on PMMA substrate during laser ablation in air and with metal-film protection. The method presented here is suitable for microfluidic device production while overcoming the bad surface quality and low-resolution limit of CO2 laser ablation in air.

頁(從 - 到)736-739
期刊Micro and Nano Letters
出版狀態Published - 2012 八月 1

All Science Journal Classification (ASJC) codes

  • 生物工程
  • 生物醫學工程
  • 材料科學(全部)
  • 凝聚態物理學


深入研究「Fabrication of sub-spot-size microchannel of microfluidic chip using CO<sub>2</sub> laser processing with metal-film protection」主題。共同形成了獨特的指紋。