Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method

Po Ching Kao, Sheng Yuan Chu, Chuan Yi Zhan, Lien Chung Hsu, Wen Chang Liao

研究成果: Conference contribution

6 引文 斯高帕斯(Scopus)

摘要

A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm × 300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.

原文English
主出版物標題2005 5th IEEE Conference on Nanotechnology
發行者IEEE Computer Society
頁面693-695
頁數3
ISBN(列印)0780391993, 9780780391994
DOIs
出版狀態Published - 2005
事件2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan
持續時間: 2005 7月 112005 7月 15

出版系列

名字2005 5th IEEE Conference on Nanotechnology
2

Other

Other2005 5th IEEE Conference on Nanotechnology
國家/地區Japan
城市Nagoya
期間05-07-1105-07-15

All Science Journal Classification (ASJC) codes

  • 一般工程

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