Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method

Po Ching Kao, Sheng-Yuan Chu, Chuan Yi Zhan, Lien-Chung Hsu, Wen Chang Liao

研究成果: Conference contribution

5 引文 (Scopus)

摘要

A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm × 300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.

原文English
主出版物標題2005 5th IEEE Conference on Nanotechnology
頁面885-887
頁數3
DOIs
出版狀態Published - 2005 十二月 1
事件2005 5th IEEE Conference on Nanotechnology - Nagoya, Japan
持續時間: 2005 七月 112005 七月 15

出版系列

名字2005 5th IEEE Conference on Nanotechnology
2

Other

Other2005 5th IEEE Conference on Nanotechnology
國家Japan
城市Nagoya
期間05-07-1105-07-15

指紋

Photolithography
Lithography
Pixels
Fabrication
Wet etching
Aspect ratio
Anodes
Substrates
Costs

All Science Journal Classification (ASJC) codes

  • Engineering(all)

引用此文

Kao, P. C., Chu, S-Y., Zhan, C. Y., Hsu, L-C., & Liao, W. C. (2005). Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. 於 2005 5th IEEE Conference on Nanotechnology (頁 885-887). [1500860] (2005 5th IEEE Conference on Nanotechnology; 卷 2). https://doi.org/10.1109/NANO.2005.1500860
Kao, Po Ching ; Chu, Sheng-Yuan ; Zhan, Chuan Yi ; Hsu, Lien-Chung ; Liao, Wen Chang. / Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. 2005 5th IEEE Conference on Nanotechnology. 2005. 頁 885-887 (2005 5th IEEE Conference on Nanotechnology).
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Kao, PC, Chu, S-Y, Zhan, CY, Hsu, L-C & Liao, WC 2005, Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. 於 2005 5th IEEE Conference on Nanotechnology., 1500860, 2005 5th IEEE Conference on Nanotechnology, 卷 2, 頁 885-887, 2005 5th IEEE Conference on Nanotechnology, Nagoya, Japan, 05-07-11. https://doi.org/10.1109/NANO.2005.1500860

Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. / Kao, Po Ching; Chu, Sheng-Yuan; Zhan, Chuan Yi; Hsu, Lien-Chung; Liao, Wen Chang.

2005 5th IEEE Conference on Nanotechnology. 2005. p. 885-887 1500860 (2005 5th IEEE Conference on Nanotechnology; 卷 2).

研究成果: Conference contribution

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AB - A new patterning method has been developed to fabricate the patterned organic light emitting devices (OLEDs) with pixels of 500 μm × 300 μm on the flexible PET substrates. The patterns of the pixel array were defined in crossed-strip style with ITO anode patterned using a combination of the roller-type imprinting lithography and photolithography (CRIP), followed by wet chemical etching. Compared with the conventional imprint lithography or photolithography, CRIP using the hybrid mold has the advantages of better uniformity, less force, less time-consuming, lower cost and higher aspect ratio.

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Kao PC, Chu S-Y, Zhan CY, Hsu L-C, Liao WC. Fabrication of the patterned flexible OLEDs using a combined roller imprinting and photolithography method. 於 2005 5th IEEE Conference on Nanotechnology. 2005. p. 885-887. 1500860. (2005 5th IEEE Conference on Nanotechnology). https://doi.org/10.1109/NANO.2005.1500860