Fast multiphoton microfabrication of freeform polymer microstructures by spatiotemporal focusing and patterned generation

Y. C. Li, L. C. Cheng, C. H. Lien, C. Y. Chang, W. C. Yen, S. J. Chen

研究成果: Conference contribution

1 引文 斯高帕斯(Scopus)

摘要

One of the limits of a conventional multiphoton microfabrication is its low throughput due to the sequential nature of scanning process. In this study, a multiphoton microfabrication system based on spatiotemporal focusing and patterned excitation has been developed to provide freeform polymer microstructures fast. The system integrates a 10 kHz repetition rate ultrafast amplifier featuring strong instantaneous peak power (maximum 400 μJ/pulse at 90 fs pulse width) with a digital micromirror device generating designed patterns at the focal plane. As the result, three-dimensional freeform polymer microstructures using Rose Bengal as the photoinitiator are created by sequentially stacking up two-dimensional (2D) structures layer-by-layer. The size of each 2D fabrication area can be larger than 100 × 100 μm2. Compared with scanning process or fixed mask pattern generation, this approach provides two-or three-fold fabrication speed and freeform microstructures. Furthermore, the system is capable of optical sectioning the fabricated microstructures for providing 3D inspection.

原文English
主出版物標題Polymer Optics and Molded Glass Optics
主出版物子標題Design, Fabrication, and Materials II
DOIs
出版狀態Published - 2012 12月 1
事件Polymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II - San Diego, CA, United States
持續時間: 2012 8月 152012 8月 16

出版系列

名字Proceedings of SPIE - The International Society for Optical Engineering
8489
ISSN(列印)0277-786X

Conference

ConferencePolymer Optics and Molded Glass Optics: Design, Fabrication, and Materials II
國家/地區United States
城市San Diego, CA
期間12-08-1512-08-16

All Science Journal Classification (ASJC) codes

  • 電子、光磁材料
  • 凝聚態物理學
  • 電腦科學應用
  • 應用數學
  • 電氣與電子工程

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