TY - JOUR
T1 - Fast positioning and impact minimizing of mems devices by suppression motion-induced vibration by command shaping method
AU - Chen, K. S.
AU - Ou, K. S.
PY - 2009
Y1 - 2009
N2 - This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.
AB - This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.
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U2 - 10.1109/MEMSYS.2009.4805580
DO - 10.1109/MEMSYS.2009.4805580
M3 - Conference article
AN - SCOPUS:65949105283
SN - 1084-6999
SP - 1103
EP - 1106
JO - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
JF - Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)
M1 - 4805580
T2 - 22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009
Y2 - 25 January 2009 through 29 January 2009
ER -