This work presents a command-shaping based scheme for both fast positioning and reducing contact impact ofMEMS devices by suppression motion-induced vibrations. The scheme was developed by applying energy conservation, force equilibrium, and elliptical integrals. Simulink simulations indicated that both of the impact force and settling time can be effectively reduced. Specimen fabricated using Su-8 and a test bed was designed to further demonstrate the performance of the proposed scheme and the test results indicated that the proposed approach can effectively enhance the dynamic performance ofMEMS devices such as RF switches.
|頁（從 - 到）||1103-1106|
|期刊||Proceedings of the IEEE International Conference on Micro Electro Mechanical Systems (MEMS)|
|出版狀態||Published - 2009|
|事件||22nd IEEE International Conference on Micro Electro Mechanical Systems, MEMS 2009 - Sorrento, Italy|
持續時間: 2009 1月 25 → 2009 1月 29
All Science Journal Classification (ASJC) codes